au.\*:("MIDOH, Yoshihiro")
Results 1 to 6 of 6
Selection :
Line edge roughness measurement of nanostructures in SEM metrology by using statistically matched waveletMIDOH, Yoshihiro; NAKAMAE, Koji; FUJIOKA, Hiromu et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67630F.1-67630F.9, issn 0277-786X, isbn 978-0-8194-6923-6, 1VolConference Paper
Defect inspection using a high-resolution pattern image obtained from multiple low-resolution images of the same pattern on an observed noisy SEM imageTAKASHIMA, Masahiko; MIDOH, Yoshihiro; NAKAMAE, Koji et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692216.1-692216.11, issn 0277-786X, isbn 978-0-8194-7107-9Conference Paper
A comparison of wavelet multiresolution analysis and scale-space edge detection for lithography metrologyMIDOH, Yoshihiro; NAKAMAE, Koji; FUJIOKA, Hiromu et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63830H.1-63830H.9, issn 0277-786X, isbn 0-8194-6481-3, 1VolConference Paper
Boundary extraction in the SEM cross section of LSINAKAMAE, Koji; MIDOH, Yoshihiro; MIURA, Katsuyoshi et al.SPIE proceedings series. 2001, pp 451-458, isbn 0-8194-4300-XConference Paper
The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localizationNIKAWA, Kiyoshi; YAMASHITA, Masatsugu; MATSUMOTO, Toru et al.Microelectronics and reliability. 2011, Vol 51, Num 9-11, pp 1624-1631, issn 0026-2714, 8 p.Conference Paper
Laser THz emission microscope as a novel tool for LSI failure analysisYAMASHITA, Masatsugu; OTANI, Chiko; KIM, Sunmi et al.Microelectronics and reliability. 2009, Vol 49, Num 9-11, pp 1116-1126, issn 0026-2714, 11 p.Conference Paper